Metrology
Optics
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Open Access
Abstract: X-ray mirrors with single-digit nanometer height errors are required to preserve the quality of ultra-intense photon beams produced at synchrotron or free electron laser sources. To fabricate suitable X-ray mirrors, accurate metrology data is needed for deterministic polishing machines. Fizeau phase-shifting interferometers are optimized to achieve accurate results under nulled conditions. However, for curved or aspheric mirrors, a limited choice of reference optic often necessitates measurement under non-nulled conditions, which can introduce retrace error. Using experimental measurements of a multi-tilted calibration mirror, we have developed an empirical model of Fizeau retrace error, based on Zernike polynomial fitting. We demonstrate that the model is in good agreement with measurements of ultra-high quality, weakly-curved X-ray mirrors with sags of only a few tens of microns. Removing the predicted retrace error improves the measurement accuracy for full aperture, single shot, Fizeau interferometry to < 2 nm RMS.
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Aug 2023
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Metrology
Optics
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Abstract: This paper describes the application of optical interferometry for high accuracy angle metrology to characterize the performance of Diamond Light Source’s small angle generator NANGO that is used to support testing of x-ray optics. The optical interferometer offers a higher resolution and bandwidth than is achievable with commercially available autocollimators and was used to measure traceably nanoradian steps and sub nanoradian oscillations generated by NANGO.
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Aug 2023
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B16-Test Beamline
Metrology
Optics
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Open Access
Abstract: Speckle-based at-wavelength metrology techniques now play an important role in X-ray wavefront measurements. However, for reflective X-ray optics, the majority of existing speckle-based methods fail to provide reliable 2D information about the optical surface being characterized. Compared with the 1D information typically output from speckled-based methods, a 2D map is more informative for understanding the overall quality of the optic being tested. In this paper, we propose a method for in situ 2D absolute metrology of weakly focusing X-ray mirrors. Importantly, the angular misalignment of the mirror can be easily corrected with the proposed 2D processing procedure. We hope the speckle pattern data processing method presented here will help to extend this technique to wider applications in the synchrotron radiation and X-ray free-electron laser communities.
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Nov 2022
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Metrology
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Open Access
Abstract: The angular performance of a nano-angle generator (NANGO) developed at Diamond Light Source has been characterised using a dual-beam laser interferometer designed and built at the National Physical Laboratory (NPL). NANGO is a flexure-based, piezo actuated device which generates milli- to sub-nano-radian angles for the calibration of metrology instruments used to test the quality of synchrotron X-ray mirrors and angular nano-positioning stages at Diamond. The NPL interferometer provides traceability for small angle measurements made by NANGO. An uncertainty budget has been developed for measurements over a 50 nanoradian range. In closed-loop, using feedback from the NANGO's angle encoder, for the first time we show that 1 nanoradian steps made by NANGO are measurable by an external metrology device. The 200 kHz acquisition rate of the NPL angle interferometer also reveals new dynamic information about NANGO's angular motion. The NPL interferometer demonstrates that NANGO in open-loop can make: distinct steps of 500 picoradians; sinusoidal oscillations at 0.4 Hz with an amplitude of 125 picoradians; or 1 nanoradian oscillations at 40 Hz. Traceability to the SI though National Metrology Institute instrumentation for NANGO will provide enhanced accuracy for a wide range of angle metrology applications at Diamond, including inputs to deterministic polishing techniques for the creation of next-generation X-ray mirrors and dynamic characterisation of nano-positioning stages.
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Oct 2022
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Metrology
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Open Access
Abstract: X-ray computed tomography (XCT) is increasingly used for dimensional metrology, where it can offer accurate measurements of internal features that are not accessible with other techniques. However, XCT scanning can be relatively slow, which often prevents routine uptake for many applications. This paper explores the feasibility of improving the speed of XCT measurements whilst maintaining the quality of the dimensional measurements derived from reconstructed volumes. In particular, we compare two approaches to fast XCT acquisition, the use of fewer XCT projections as well as the use of shortened x-ray exposure times for each projection. The study shows that the additional Poisson noise produced by reducing the exposure for each projection has significantly less impact on dimensional measurements compared to the artefacts associated with strategies that take fewer projection images, leading to about half the measurement error variability. Advanced reconstruction algorithms such as the conjugate gradient least squares method or total variation constrained approaches, are shown to allow further improvements in measurement speed, though this can come at the cost of increased measurement bias (e.g. 2.8 % increase in relative error in one example) and variance (e.g. 25 % in the same example).
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Jun 2022
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Metrology
Optics
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Giuseppe
Mercurio
,
Jaromír
Chalupský
,
Ioana-Theodora
Nistea
,
Michael
Schneider
,
Věra
Hájková
,
Natalia
Gerasimova
,
Robert
Carley
,
Michele
Cascella
,
Loïc
Le Guyader
,
Laurent
Mercadier
,
Justine
Schlappa
,
Kiana
Setoodehnia
,
Martin
Teichmann
,
Alexander
Yaroslavtsev
,
Tomáš
Burian
,
Vojtĕch
Vozda
,
Luděk
Vyšín
,
Jan
Wild
,
David
Hickin
,
Alessandro
Silenzi
,
Marijan
Stupar
,
Jan
Torben Delitz
,
Carsten
Broers
,
Alexander
Reich
,
Bastian
Pfau
,
Stefan
Eisebitt
,
Daniele
La Civita
,
Harald
Sinn
,
Maurizio
Vannoni
,
Simon G.
Alcock
,
Libor
Juha
,
Andreas
Scherz
Open Access
Abstract: A real-time and accurate characterization of the X-ray beam size is essential to enable a large variety of different experiments at free-electron laser facilities. Typically, ablative imprints are employed to determine shape and size of µm-focused X-ray beams. The high accuracy of this state-of-the-art method comes at the expense of the time required to perform an ex-situ image analysis. In contrast, diffraction at a curved grating with suitably varying period and orientation forms a magnified image of the X-ray beam, which can be recorded by a 2D pixelated detector providing beam size and pointing jitter in real time. In this manuscript, we compare results obtained with both techniques, address their advantages and limitations, and demonstrate their excellent agreement. We present an extensive characterization of the FEL beam focused to ≈1 µm by two Kirkpatrick-Baez (KB) mirrors, along with optical metrology slope profiles demonstrating their exceptionally high quality. This work provides a systematic and comprehensive study of the accuracy provided by curved gratings in real-time imaging of X-ray beams at a free-electron laser facility. It is applied here to soft X-rays and can be extended to the hard X-ray range. Furthermore, curved gratings, in combination with a suitable detector, can provide spatial properties of µm-focused X-ray beams at MHz repetition rate.
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May 2022
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Metrology
Optics
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Open Access
Abstract: Reflective mirrors are used on most synchrotron and free electron laser (XFEL) beamlines to transport X-rays from the source to the sample. They are achromatic and provide larger acceptance and less absorption compared to compound refractive lenses. Mirrors whose surface profile can be controllably changed are called “active optics.” This enables users to vary the beam profile or focal position. X-ray beamlines use two categories of active optics: mechanically actuated mirrors, which typically use one or two independent bending motors for cylindrical or elliptical bending [1]; and piezoelectric bimorph deformable mirrors.
Bimorph deformable X-ray mirrors have been used to focus X-rays at synchrotron and XFEL beamlines since early research in the 1990s by Susini et al. [2] and Signorato et al. [3] at the European Synchrotron Radiation Facility (France). Soon afterwards, bimorph mirrors were commercialized by Thales-SESO (France) and deployed at several labs, including the Advanced Photon Source (USA) and Diamond Light Source (UK), called “Diamond” from here on. Research by Diamond’s Optics & Metrology (O&M) group shows that the widely held bad impression of bimorph mirrors as unreliable and excessively complex is outdated and unfounded. With fast, precise metrology techniques developed at Diamond, the difficulties encountered by the early users of bimorph mirrors have been overcome, and Diamond has combined bimorph actuators with specialized substrates for several novel applications. Finally, Diamond’s improvements can help realize the true potential of bimorph mirrors to act as closed-loop, adaptive X-ray optics with real-time correction. Such dynamic optics could match the profile of an X-ray beam to a series of rapidly changing samples of different shapes and sizes, or provide fast, stable wavefront correction.
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Apr 2022
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B16-Test Beamline
Metrology
Optics
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Diamond Proposal Number(s):
[19902]
Open Access
Abstract: As an important characterization method for beamline optics, at-wavelength metrology technology based on wavefront measurements has been developed for many years. However, the previous studies on at-wavelength metrology of reflective mirrors is limited to the indirect method. So, the accurate surface information of the mirror under test would normally be inaccessible because of lack of experimental deconvolution between the mirror and any backgrounds from upstream optics. In this study, an absolute metrology method is developed based on the speckle scanning technique. Using this method, the surface profile of the mirror can be extracted exactly from the mixed information of the entire upstream beamline. At the same time, data acquisition time can also be significantly reduced by the processing algorithm introduced in this study without sacrificing the angular sensitivity.
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Nov 2019
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Metrology
Optics
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Open Access
Abstract: We present recent advancements in the Optical Metrology Laboratory (OML) at Diamond Light Source. Improvements in optical manufacturing technology, and demands from beamlines at synchrotron and free electron laser facilities, have made it a necessity to routinely characterize X-ray mirrors with slope errors < 100 nrad rms. The Diamond-NOM profiler can measure large, fully assembled optical systems in a sideways, upwards, or downwards facing geometry. Examples are provided of how it has recently characterized several challenging systems, including: actively bent mirrors; clamped monochromator gratings in a downward-facing geometry; and four, state-of-the-art, elliptically bent, long mirrors with slope errors < 100 nrad rms. The NOM’s components and data analysis procedures are continuously updated to stay ahead of the ever-increasing quality of X-ray optics and opto-mechanics. The OML’s newest instrument is a Zygo HDX 6” Fizeau interferometer. A dedicated support frame and motorized translation and rotation stages enable sub-aperture images to be stitched together using in-house controls and automation software. Cross-comparison of metrology data, including as part of the MooNpics collaboration, provides a valuable insight into the nature of optical defects and helps to push optical fabrication to a new level of quality.
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Sep 2019
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Metrology
Optics
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Open Access
Abstract: Meeting the ever-increasing performance demands of X-ray beamlines at modern synchrotrons, such as Diamond Light Source (DLS), requires the use of ultra-high-quality X-ray mirrors with surface deviations of less than a few nanometres from their ideal shape. Ion beam figuring (IBF) is frequently used for creating mirrors of this precision, but achieving the highest accuracy is critically dependent on careful alignment and precise metrology of defects on the optical surface. Multiple iterations of measurement and correction are typically required, and convergence towards the requisite shape can be a slow process. DLS have designed and built an in-house IBF system that comprises a large diameter DC gridded ion source, and a 4-axis motion stage for manipulating the mirror being figured. Additionally, a slope measuring profilometer for in-situ metrology, and an imaging system for alignment, are also built into the system. The advantages of incorporating these extra components are twofold: fast metrology feedback after each figuring run will considerably reduce the time required to perform multiple figuring iterations; and alignment and indexing errors will be drastically reduced when transferring the optic. Complemented by the Optical Metrology Laboratory at DLS and at-wavelength X-ray measurements on the Test beamline B16, it is expected that this system will enable rapid development and testing of high-quality mirrors with novel designs for micro- and nano-focussing of X-rays.
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Sep 2019
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