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Instruments / Technical Area	Publication Details	Published	Actions
I18-Microfocus Spectroscopy	Laser annealed low temperature deposited polysilicon waveguides for nonlinear photonics Yohann Franz , Antoine Runge , Swezin Oo , Noel Healy , Gregorio Martinez-Jimenez , Ali Khokhar , Antulio Tarazona , Harold Chong , Sakellaris Mailis , Anna Peacock Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC, 2017) DOI: 10.1109/CLEOE-EQEC.2017.8086626 Diamond Proposal Number(s): [13025] Show Abstract ▼ Abstract: The intrinsic properties of silicon (Si) make it an excellent material for integrated photonics devices with small footprints [1]. To date, most of the reported devices have been based on crystalline silicon (c-Si), but this material suffers from difficult integration with electronic layers due to fabrication constraints. Subsequently, there has been growing interest in alternative forms of Si, such as hydrogenated amorphous silicon (a-Si:H), silicon nitride (SiN) and polysilicon (poly-Si) [2]. Among these materials, only poly-Si has the potential to exhibit both optical and electronic properties that are equivalent to c-Si. However, to achieve good material quality, poly-Si is typically deposited at temperatures higher than 900°C, rendering it incompatible with most CMOS fabrication processes. Thus there is a growing drive to develop new techniques to deposit poly-Si at low temperatures (<450°C) [2], but so far the optical losses in these materials have been high, limiting its use in all-optical systems employing nonlinear optical processing. In this work, we report the fabrication and characterisation of laser annealed, low temperature deposited silicon waveguides with low optical losses. Our results represent the first demonstration of nonlinear propagation in a poly-Si waveguide suitable for integration.	Oct 2017

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I18-Microfocus Spectroscopy

Laser annealed low temperature deposited polysilicon waveguides for nonlinear photonics

Yohann Franz , Antoine Runge , Swezin Oo , Noel Healy , Gregorio Martinez-Jimenez , Ali Khokhar , Antulio Tarazona , Harold Chong , Sakellaris Mailis , Anna Peacock

Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC, 2017)

DOI: 10.1109/CLEOE-EQEC.2017.8086626

Diamond Proposal Number(s): [13025]

Show Abstract ▼

Oct 2017