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Recent upgrades to the Diamond-NOM: a slope measuring profiler capable of charactering the surface profile of large optics with subnanometre repeatability

DOI: 10.1117/12.861623 DOI Help

Authors: Simon Alcock (Diamond Light Source) , Kawal Sawhney (Diamond Light Source) , Stewart Scott (Diamond Light Source)
Co-authored by industrial partner: No

Type: Conference Paper
Conference: SPIE: Advances in Metrology for X-Ray and EUV Optics III
Peer Reviewed: No

State: Published (Approved)
Published: August 2010

Abstract: The Diamond-NOM is a non-contact, slope measuring profiler, capable of measuring surface topography of large optics (up to 1.5m long) with sub-nanometre height resolution and repeatability. On numerous occasions, the Diamond-NOM has proven to be an invaluable metrology tool for independently validating new beamline optics, and for investigating potential problems with optics from established beamlines. Data from the Diamond-NOM have consistently been in close agreement with results generated by a range of metrology instruments at other synchrotron laboratories and optic manufacturers. Prior to beamline installation, significant X-ray commissioning time was saved by optimizing and calibrating adaptive optics using the Diamond-NOM. We report on the current operational capabilities of the Diamond- NOM and give technical details of recent upgrades, including a penta-mirror (two, high grade reflectors used to mimic the internal working surfaces of a traditional pentaprism) and the capability to measure optics in sideward, downward, or upward facing geometries.

Journal Keywords: Diamond-Nom; Slope Measuring Profiler; Metrology; Synchrotron Optics; Slope Errors

Subject Areas: Technique Development, Physics

Technical Areas: Optics

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