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Square and hexagonal columnar liquid crystals confined in square and triangular pores

DOI: 10.1002/adfm.201806078 DOI Help

Authors: Rui-bin Zhang (Zhejiang Sci‐Tech University; University of Sheffield) , Xiang-bing Zeng (University of Sheffield) , Chunyan Wu (Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) , Qinghui Jin (Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) , Yongsong Liu (Zhejiang Sci‐Tech University) , Goran Ungar (Zhejiang Sci‐Tech University; University of Sheffield)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Advanced Functional Materials , VOL 23

State: Published (Approved)
Published: November 2018

Abstract: Silicon oxide‐containing diamond‐like carbon (a‐C:H:Si:O) films are a promising class of protective coatings for environmentally‐demanding applications owing to their lower residual stresses and superior thermal stability and oxidation resistance relative to undoped diamond‐like carbon. However, existing versions of a‐C:H:Si:O deposited by traditional methods such as plasma‐enhanced chemical vapor deposition (PECVD) undergo substantial degradation and oxidation at temperatures above 250 °C. This, together with the difficulty of PECVD in depositing conformal coatings on complex geometries such as high‐aspect‐ratio features, has limited the applicability of a‐C:H:Si:O. Here, the unique capabilities of plasma immersion ion implantation and deposition (PIIID) to grow silicon oxide‐rich diamond‐like carbon materials that are ultrasmooth, continuous, and conformal on high‐aspect‐ratio topographies are explored. The high concentration of silicon and oxygen in PIIID‐grown films (23 ± 5 at.% and 11 ± 4 at.%, respectively) is unrivalled for this class of materials, and drastically increases the resistance to oxidation at high temperatures, compared with PECVD‐grown films. The results open the path for using a‐C:H:Si:O in applications involving exposure of materials to extreme environments.

Journal Keywords: axial orientation; columnar liquid crystals; confinement; square pores; triangular pores

Subject Areas: Materials

Instruments: I22-Small angle scattering & Diffraction