A peeling approach for integrated manufacturing of large mono-layer h-BN crystals

DOI: 10.1021/acsnano.8b08712

Authors: Ruizhi Wang (University of Cambridge) , David G. Purdie (University of Cambridge) , Ye Fan (University of Cambridge) , Fabien C-P. Massabuau (University of Cambridge) , Philipp Braeuninger-Weimer (University of Cambridge) , Oliver J. Burton (University of Cambridge) , Raoul Blume (Helmholtz-Zentrum Berlin für Materialen und Energie) , Robert Schloegl (Fritz Haber Institute) , Antonio Lombardo (University of Cambridge) , Robert S. Weatherup (University of Cambridge; Diamond Light Source) , Stephan Hofmann (University of Cambridge)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Acs Nano

State: Published (Approved)
Published: January 2019

Abstract: Hexagonal boron nitride (h-BN) is the only known material aside from graphite with a structure composed of simple, stable, non-corrugated atomically thin layers. While historically used as lubricant in powder form, h-BN layers have become particularly attractive as an ultimately thin insulator, barrier or encapsulant. Practically all emerging electronic and photonic device concepts currently rely on h-BN exfoliated from small bulk crystallites, which limits device dimensions and process scalability. We here focus on a systematic understanding of Pt catalysed h-BN crystal formation, in order to address this integration challenge for mono-layer h-BN via an integrated chemical vapour deposition (CVD) process that enables h-BN crystal domain sizes exceeding 0.5 mm and a merged, continuous layer in a growth time less than 45 min. The process makes use of commercial, reusable Pt foils, and allows a delamination process for easy and clean h-BN layer transfer. We demonstrate sequential pick-up for the assembly of graphene/h-BN heterostructures with atomic layer precision, while minimizing interfacial contamination. The approach can be readily combined with other layered materials and enables the integration of CVD h-BN into high quality, reliable 2D material device layer stacks.

Journal Keywords: h-BN; 2D materials; CVD; transfer; catalyst; heterostructures; graphene; platinum

Subject Areas: Materials, Chemistry


Technical Areas:

Added On: 21/01/2019 11:57

Discipline Tags:

Physical Chemistry Catalysis Chemistry Materials Science

Technical Tags: