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Absolute metrology method of the x-ray mirror with speckle scanning technique

DOI: 10.1364/AO.58.008658 DOI Help

Authors: Lian Xue (Shanghai Advanced Research Institute, Chinese Academy of Sciences) , Zhongliang Li (Shanghai Advanced Research Institute, Chinese Academy of Sciences) , Tunhe Zhou (Diamond Light Source) , Xiaohao Dong (Shanghai Advanced Research Institute, Chinese Academy of Sciences) , Hongxin Luo (Shanghai Advanced Research Institute, Chinese Academy of Sciences) , Hongchang Wang (Diamond Light Source) , Kawal Sawhney (Diamond Light Source) , Jie Wang (Shanghai Advanced Research Institute, Chinese Academy of Sciences)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Applied Optics , VOL 58

State: Published (Approved)
Published: November 2019
Diamond Proposal Number(s): 19902

Open Access Open Access

Abstract: As an important characterization method for beamline optics, at-wavelength metrology technology based on wavefront measurements has been developed for many years. However, the previous studies on at-wavelength metrology of reflective mirrors is limited to the indirect method. So, the accurate surface information of the mirror under test would normally be inaccessible because of lack of experimental deconvolution between the mirror and any backgrounds from upstream optics. In this study, an absolute metrology method is developed based on the speckle scanning technique. Using this method, the surface profile of the mirror can be extracted exactly from the mixed information of the entire upstream beamline. At the same time, data acquisition time can also be significantly reduced by the processing algorithm introduced in this study without sacrificing the angular sensitivity.

Subject Areas: Technique Development, Physics


Instruments: B16-Test Beamline

Other Facilities: ALBA

Added On: 05/12/2019 09:56

Discipline Tags:

Optics Physics Technique Development - Physics

Technical Tags:

Diffraction