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APT tip shape modifications during analysis, its implications, and the potential to measure tip shapes in real time via soft-X-ray ptychography

DOI: 10.1017/S1431927619013254 DOI Help

Authors: Paul Van Der Heide (IMEC) , Igor Mathotkin (IMEC; KU Leuven) , Wilfried Vandervorst (IMEC; KU Leuven) , Claudia Fleischmann (IMEC)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Microscopy And Microanalysis , VOL 25 , PAGES 2504 - 2505

State: Published (Approved)
Published: August 2019

Subject Areas: Technique Development


Instruments: I13-1-Coherence

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