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Improving the soft X-ray reflectivity of Cr/Ti multilayers by co-deposition of B4C

DOI: 10.1107/S1600577520011741 DOI Help

Authors: Jingtao Zhu (Tongji University) , Jiayi Zhang (Tongji University) , Haochuan Li (Tongji University) , Yuchun Tu (Tongji University; Sorbonne Université) , Jinwen Chen (Tongji University) , Hongchang Wang (Diamond Light Source) , Sarnjeet S. Dhesi (Diamond Light Source) , Mingqi Cui (Institute of High Energy Physics, Chinese Academic of Science) , Jie Zhu (Tongji University) , Philippe Jonnard (Sorbonne Université)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Journal Of Synchrotron Radiation , VOL 27

State: Published (Approved)
Published: November 2020

Abstract: The `water window', covering 2.4–4.4 nm, is an important wavelength range particularly essential to biology research. Cr/Ti multilayers are one of the promising reflecting elements in this region because the near-normal-incidence reflectivity is theoretically as high as 64% at 2.73 nm. However, due to multilayer imperfections, the reported reflectivity is lower than 3% for near-normal incidence. Here, B and C were intentionally incorporated into ultra-thin Cr/Ti soft X-ray multilayers by co-deposition of B4C at the interfaces. The effect on the multilayer structure and composition has been investigated using X-ray reflectometry, X-ray photoelectron spectroscopy, and cross-section electron microscopy. It is shown that B and C are mainly bonded to Ti sites, forming a nonstoichiometric TiBxCy composition, which hinders the interface diffusion, supresses the crystallization of the Cr/Ti multilayer and dramatically improves the interface quality of Cr/TiBxCy multilayers. As a result, the near-normal-incidence reflectivity of soft X-rays increases from 4.48% to 15.75% at a wavelength of 2.73 nm.

Journal Keywords: synchrotron radiation; multilayer; interface; Cr/Ti.

Subject Areas: Materials, Physics, Technique Development

Instruments: I06-Nanoscience

Added On: 28/10/2020 10:52

Discipline Tags:

Materials Science Technique Development - Material Sciences Physics Surfaces interfaces and thin films Technique Development - Physics

Technical Tags:

Diffraction X-ray Reflectivity (XRR)