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Scanning x-ray microscopy: A sub-100 nm probe toward strain and composition in seeded horizontal Ge(110) nanowires

DOI: 10.1063/5.0085788 DOI Help

Authors: Michael Hanke (Paul-Drude-Institut für Festkörperelektronik, Leibniz-Institut im Forschungsverbund Berlin) , Carsten Richter (Leibniz-Institut für Kristallzüchtung) , Felix Lange (Leibniz-Institut für Kristallzüchtung) , Anna Reis (Paul-Drude-Institut für Festkörperelektronik, Leibniz-Institut im Forschungsverbund Berlin) , Julia Parker (Diamond Light Source) , Torsten Boeck (Leibniz-Institut für Kristallzüchtung)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Applied Physics Letters , VOL 120

State: Published (Approved)
Published: March 2022
Diamond Proposal Number(s): 22484

Open Access Open Access

Abstract: We have spatially investigated lattice spacing, twist, and bending in individual laterally (110)-oriented Ge nanowires (NWs) on pre-patterned Si(001) substrates. A combination of synchrotron-based scanning x-ray diffraction microscopy with an x-ray focus size of 50 nm and numerical finite element calculations on the elastic strain reveals a three-dimensional relaxation scenario, which becomes particularly complex next to NW nucleation points. Despite a lattice mismatch of 4.2%, lattice compliance is preserved, since strain can effectively be released close to the seeding window. Areas in the NWs other than that appear fully relaxed. The resulting NW twist, i.e., lattice rotations around the growth axis, amounts to less than 0.1°.

Journal Keywords: X-ray microscopy; X-ray diffraction; Materials analysis; Linear elasticity; Synchrotrons; Nanowires

Subject Areas: Physics, Materials

Instruments: I14-Hard X-ray Nanoprobe

Added On: 15/03/2022 09:39


Discipline Tags:

Physics Materials Science Nanoscience/Nanotechnology

Technical Tags:

Microscopy X-ray Microscopy Scanning X-ray Microscopy