The Delta Robot—A long travel nano-positioning stage for scanning x-ray microscopy

DOI: 10.1063/5.0084806

Authors: Jon Kelly (Diamond Light Source) , Andrew Male (Diamond Light Source) , Nicholas Rubies (Diamond Light Source) , David Mahoney (Diamond Light Source) , Jessica Walker (Diamond Light Source) , Miguel A. Gomez-Gonzalez (Diamond Light Source) , Guy Wilkin (Diamond Light Source) , Julia E. Parker (Diamond Light Source) , Paul D. Quinn (Diamond Light Source)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Review Of Scientific Instruments , VOL 93

State: Published (Approved)
Published: April 2022

Abstract: A new stage design concept, the Delta Robot, is presented, which is a parallel kinematic design for scanning x-ray microscopy applications. The stage employs three orthogonal voice coils, which actuate parallelogram flexures. The design has a 3 mm travel range and achieves rms position jitter, integrated from 1 Hz to 1 kHz, of 2.8 and 1.3 nm perpendicular to the beam and 5.6 nm along the beam direction with loads up to 350 g. The Delta Robot design process used a mechatronics approach of iterative modeling and simulation to develop the system and validate performance. The design considerations, design process, stability, and operational performance on the hard x-ray nanoprobe at Diamond Light Source are presented.

Subject Areas: Engineering


Instruments: I14-Hard X-ray Nanoprobe

Added On: 28/04/2022 13:56

Documents:
5.0084806.pdf

Discipline Tags:

Engineering & Technology

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