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Application of kinoform lens for X-ray reflectivity analysis

DOI: 10.1107/S0909049509055009 DOI Help
PMID: 20157277 PMID Help

Authors: Manoj Tiwari (Diamond Light Source) , Lucia Alianelli (Diamond Light Source) , Igor Dolbnya (Diamond Light Source) , Kawal Sawhney (Diamond Light Source)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Journal Of Synchrotron Radiation , VOL 17 (2) , PAGES 237-242

State: Published (Approved)
Published: January 2010

Abstract: In this paper the first practical application of kinoform lenses for the X-ray reflectivity characterization of thin layered materials is demonstrated. The focused X-ray beam generated from a kinoform lens, a line of nominal size ~50 µm × 2 µm, provides a unique possibility to measure the X-ray reflectivities of thin layered materials in sample scanning mode. Moreover, the small footprint of the X-ray beam, generated on the sample surface at grazing incidence angles, enables one to measure the absolute X-ray reflectivities. This approach has been tested by analyzing a few thin multilayer structures. The advantages achieved over the conventional X-ray reflectivity technique are discussed and demonstrated by measurements.

Journal Keywords: Kinoform Lens; X-Ray Reflectivity; Thin Multilayer Structures; Synchrotron Radiation Source.

Subject Areas: Technique Development

Instruments: B16-Test Beamline