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Grating-based at-wavelength metrology of hard x-ray reflective optics

DOI: 10.1364/OL.37.004464 DOI Help

Authors: Sebastien Berujon (Diamond Light Source) , Eric Ziegler
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Optics Letters , VOL 37 (21)

State: Published (Approved)
Published: October 2012

Abstract: A mean of characterizing the tangential shape of a hard x-ray mirror is presented. Derived from a group of methods operating under visible light, its application in the x-ray domain using an x-ray absorption grating allows recovery of the mirror shape with nanometer accuracy and submillimeter spatial resolution. The method works with incoherent light, does not require any a priori information about the mirror characteristics and allows shape reconstruction of x-ray reflective optics under thermal and mechanical working conditions.

Subject Areas: Technique Development

Technical Areas: Optics