Tensile strain mapping in flat germanium membranes

DOI: 10.1063/1.4874836

Authors: S. D. Rhead (University of Warwick) , J. E. Halpin (University of Warwick) , V. A. Shah (University of Warwick) , M. Myronov (The University of Warwick) , D. H. Patchett (University of Warwick) , P. S. Allred (University of Warwick) , V. Kachkanov (Diamond Light Source) , I. P. Dolbnya (Diamond Light Source) , J. S. Reparaz (Institut Catala de Nanociencia i Nanotecnologia) , N. R. Wilson (University of Warwick) , C. M. Sotomayor Torres (Institut Catala de Nanociencia i Nanotecnologia) , D. R. Leadley (University of Warwick)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Applied Physics Letters , VOL 104 (17)

State: Published (Approved)
Published: April 2014
Diamond Proposal Number(s): 8583

Abstract: Scanning X-ray micro-diffraction has been used as a non-destructive probe of the local crystalline quality of a thin suspended germanium (Ge) membrane. A series of reciprocal space maps were obtained with ∼4 μm spatial resolution, from which detailed information on the strain distribution, thickness, and crystalline tilt of the membrane was obtained. We are able to detect a systematic strain variation across the membranes, but show that this is negligible in the context of using the membranes as platforms for further growth. In addition, we show evidence that the interface and surface quality is improved by suspending the Ge.

Journal Keywords: Germanium; Membranes; Nondestructive Analysis; Spatial Resolution; X-Ray Diffraction

Diamond Keywords: Semiconductors

Subject Areas: Materials


Instruments: B16-Test Beamline

Added On: 22/05/2014 20:07

Discipline Tags:

Materials Science

Technical Tags:

Diffraction microXRD