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A method for accurate texture determination of thin oxide films by glancing-angle laboratory X-ray diffraction

DOI: 10.1107/S1600576714000569 DOI Help

Authors: Alistair Garner (University of Manchester) , Michael Preuss (University of Manchester) , Philipp Frankel (University of Manchester)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Journal Of Applied Crystallography , VOL 47 , PAGES 575 - 583

State: Published (Approved)
Published: April 2014
Diamond Proposal Number(s): 8394

Abstract: The present article describes a modification to the standard method of glancing-angle X-ray diffraction for accurate measurement of the texture of thin oxide films. The technique resolves the problems caused by overlapping diffraction peaks originating from multiphase materials with asymmetric unit cells and the peak broadening associated with sample tilt during glancing-angle texture measurement. The entire 2 range of interest is recorded as a function of sample orientation, and the integrated intensities from different crystallographic planes are extracted from fitted diffraction profiles. The technique allows for pole figures to be plotted from diffraction peaks that could otherwise not be resolved and separates contributions from neighbouring peaks, leading to a more accurate representation of the existing oxide texture. The proposed method has been used for determining texture in a 3 ┬Ám layer of monoclinic/tetragonal zirconium oxide grown during aqueous corrosion testing and has been verified by additional synchrotron X-ray diffraction measurements.

Journal Keywords: Texture; Thin Oxide Films; Glancing-Angle X-Ray Diffraction

Subject Areas: Technique Development, Materials, Engineering

Instruments: I12-JEEP: Joint Engineering, Environmental and Processing

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