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At-wavelength metrology of x-ray optics at Diamond Light Source

DOI: 10.1117/12.2062828 DOI Help

Authors: Hongchang Wang (Diamond Light Source) , Sebastien Berujon (Diamond Light Source; ESRF) , John Sutter (Diamond Light Source) , Simon Alcock (Diamond Light Source) , Kawal Sawhney (Diamond Light Source)
Co-authored by industrial partner: No

Type: Conference Paper
Conference: Advances in Metrology for X-Ray and EUV Optics V
Peer Reviewed: No

State: Published (Approved)
Published: September 2014

Open Access Open Access

Abstract: Modern, third-generation synchrotron radiation sources provide coherent and extremely bright beams of X-ray radiation. The successful exploitation of such beams depends to a significant extent on imperfections and misalignment of the optics employed on the beamlines. This issue becomes even more critical with the increasing use of active optics, and the desire to achieve diffraction-limited and coherence-preserving X-ray beams. In recent years, significant progress has been made to improve optic testing and optimization techniques, especially those using X-rays for so-called atwavelength metrology. These in-situ and at-wavelength metrology methods can be used not only to optimize the performance of X-ray optics, but also to correct and minimize the collective distortions of upstream beamline optics, including monochromators, and transmission windows. An overview of at-wavelength metrology techniques implemented at Diamond Light Source is presented, including grating interferometry and X-ray near-field speckle based techniques. Representative examples of the application of these techniques are also given, including in-situ and atwavelength calibration and optimization of: active, piezo bimorph mirrors; Kirkpatrick-Baez (KB) mirrors; and refractive optics such as compound refractive lenses. © (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Subject Areas: Technique Development

Instruments: B16-Test Beamline