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The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability

DOI: 10.1016/j.nima.2009.10.137 DOI Help

Authors: Simon Alcock (Diamond Light Source) , Kawal Sawhney (Diamond Light Source) , Stewart Scott (Diamond Light Source) , Ulrik Pedersen (Diamond Light Source) , Rob Walton (Diamond Light Source) , Frank Siewert (Helmholtz Zentrum Berlin/BESSY-II, 12489 Berlin, Germany) , Thomas Zeschke (Helmholtz Zentrum Berlin/BESSY-II, 12489 Berlin, Germany) , Fred Senf (Helmholtz Zentrum Berlin/BESSY-II, 12489 Berlin, Germany) , Tino Noll (Helmholtz Zentrum Berlin/BESSY-II, 12489 Berlin, Germany) , Heiner Lammert (Helmholtz Zentrum Berlin/BESSY-II, 12489 Berlin, Germany)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Nuclear Instruments And Methods In Physics Research A , VOL 616 , PAGES 224–228

State: Published (Approved)
Published: March 2010

Abstract: We present design and implementation details of the Diamond-NOM (nanometre optical metrology)—a non-contact profiler capable of measuring the surface topography of large (up to 1500 mm long) and heavy (up to 150 kg) optical assemblies with sub-nanometre resolution and repeatability. These levels of performance are essential to fabricate and optimize next generation optics. The capabilities of the Diamond-NOM have already enabled collaborations with optic manufacturers, including production of a preferentially deposited, large (1.2 m), synchrotron mirror with a slope error of ?0.44 ?rad rms and using bimorph technology to reduce figure error of a super-polished (elastic emission machining) optic to <1 nm peak to valley. We demonstrate that the BESSY-NOM scanning pentaprism and autocollimator concept is robust, easily transferable, and repeatable.

Journal Keywords: Bessy Storage Ring; Design; Diamonds; Errors; Implementation; Machining; Mirrors; Optics; Performance; Resolution; Surfaces; Synchrotrons; Testing; Topography; X Radiation

Subject Areas: Technique Development

Technical Areas: Optics