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The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability
DOI:
10.1016/j.nima.2009.10.137
Authors:
S. G.
Alcock
(Diamond Light Source)
,
K. J. S.
Sawhney
(Diamond Light Source)
,
S.
Scott
(Diamond Light Source)
,
U.
Pedersen
(Diamond Light Source)
,
R.
Walton
(Diamond Light Source)
,
F.
Siewert
(Helmholtz Zentrum Berlin/BESSY-II)
,
T.
Zeschke
(Helmholtz Zentrum Berlin/BESSY-II)
,
F.
Senf
(Helmholtz Zentrum Berlin/BESSY-II)
,
T.
Noll
(Helmholtz Zentrum Berlin/BESSY-II)
,
H.
Lammert
(Helmholtz Zentrum Berlin/BESSY-II)
Co-authored by industrial partner:
No
Type:
Journal Paper
Journal:
Nuclear Instruments And Methods In Physics Research A
, VOL 616
, PAGES 224228
State:
Published (Approved)
Published:
March 2010
Abstract: We present design and implementation details of the Diamond-NOM (nanometre optical metrology)—a non-contact profiler capable of measuring the surface topography of large (up to 1500 mm long) and heavy (up to 150 kg) optical assemblies with sub-nanometre resolution and repeatability. These levels of performance are essential to fabricate and optimize next generation optics. The capabilities of the Diamond-NOM have already enabled collaborations with optic manufacturers, including production of a preferentially deposited, large (1.2 m), synchrotron mirror with a slope error of ?0.44 ?rad rms and using bimorph technology to reduce figure error of a super-polished (elastic emission machining) optic to <1 nm peak to valley. We demonstrate that the BESSY-NOM scanning pentaprism and autocollimator concept is robust, easily transferable, and repeatable.
Journal Keywords: Bessy Storage Ring; Design; Diamonds; Errors; Implementation; Machining; Mirrors; Optics; Performance; Resolution; Surfaces; Synchrotrons; Testing; Topography; X Radiation
Subject Areas:
Physics
Technical Areas:
Optics
Added On:
16/04/2010 12:26