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A novel instrument for generating angular increments of 1 nanoradian
DOI:
10.1063/1.4937352
PMID:
26724074
Authors:
Simon G.
Alcock
(Diamond Light Source)
,
Alex
Bugnar
(Diamond Light Source)
,
Ioana
Nistea
(Diamond Light Source)
,
Kawal
Sawhney
(Diamond Light Source)
,
Stewart
Scott
(Diamond Light Source)
,
Michael
Hillman
(Diamond Light Source)
,
Jamie
Grindrod
(Diamond Light Source)
,
Iain
Johnson
(Diamond Light Source)
Co-authored by industrial partner:
No
Type:
Journal Paper
Journal:
Review Of Scientific Instruments
, VOL 86
State:
Published (Approved)
Published:
December 2015
Open Access
Abstract: Accurate generation of small angles is of vital importance for calibrating angle-based metrology instruments used in a broad spectrum of industries including mechatronics, nano-positioning, and optic fabrication. We present a novel, piezo-driven, flexure device capable of reliably generating micro- and nanoradian angles. Unlike many such instruments, Diamond Light Source’s nano-angle generator (Diamond-NANGO) does not rely on two separate actuators or rotation stages to provide coarse and fine motion. Instead, a single Physik Instrumente NEXLINE “PiezoWalk” actuator provides millimetres of travel with nanometre resolution. A cartwheel flexure efficiently converts displacement from the linear actuator into rotary motion with minimal parasitic errors. Rotation of the flexure is directly measured via a Magnescale “Laserscale” angle encoder. Closed-loop operation of the PiezoWalk actuator, using high-speed feedback from the angle encoder, ensures that the Diamond-NANGO’s output drifts by only ∼0.3 nrad rms over ∼30 min. We show that the Diamond-NANGO can reliably move with unprecedented 1 nrad (∼57 ndeg) angular increments over a range of >7000 μrad. An autocollimator, interferometer, and capacitive displacement sensor are used to independently confirm the Diamond-NANGO’s performance by simultaneously measuring the rotation of a reflective cube.
Journal Keywords: Metrology; Nanoradians; Angle Generator
Subject Areas:
Technique Development,
Physics
Technical Areas:
Mechanical Engineering
,
Metrology
,
Optics
Added On:
15/12/2015 09:09