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At-wavelength metrology using the X-ray speckle tracking technique: case study of a X-ray compound refractive lens

DOI: 10.1088/1742-6596/425/5/052020 DOI Help

Authors: Sebastien Berujon (Diamond Light Source) , Hongchang Wang (Diamond Light Source) , Kawal Sawhney (Diamond Light Source)
Co-authored by industrial partner: No

Type: Conference Paper
Conference: 11th International Conference on Synchrotron Radiation Instrumentation (SRI 2012)
Peer Reviewed: No

State: Published (Approved)
Published: March 2013

Abstract: The X-ray speckle tracking technique has been established on the Test beamline B16 at Diamond and is being used as a valuable tool for at-wavelength metrology. We show here the possibilities and the achievable performances of the X-ray Speckle Tracking technique for optics characterization: the description is illustrated with the case study of the characterization of a compound refractive lens. This optical element was characterized online using the speckle tracking method with nanoradian accuracy and micrometer spatial resolution. For discussion purpose, the results are compared to the ones obtained under similar conditions using a grating interferometer.

Journal Keywords: Accuracy; Optics; Spatial Resolution; Wavelengths; X Radiation

Subject Areas: Physics

Instruments: B16-Test Beamline

Added On: 26/02/2016 11:16

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