Nano-metrology: The art of measuring X-ray mirrors with slope errors < 100 nrad

DOI: 10.1063/1.4949272

Authors: Simon Alcock (Diamond Light Source) , Ioana Nistea (Diamond Light Source) , Kawal Sawhney (Diamond Light Source)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Review Of Scientific Instruments , VOL 87 , PAGES 051902

State: Published (Approved)
Published: May 2016

Abstract: We present a comprehensive investigation of the systematic and random errors of the nano-metrology instruments used to characterize synchrotron X-ray optics at Diamond Light Source. With experimental skill and careful analysis, we show that these instruments used in combination are capable of measuring state-of-the-art X-ray mirrors. Examples are provided of how Diamondmetrology data have helped to achieve slope errors of <100 nrad for optical systems installed on synchrotron beamlines, including: iterative correction of substrates using ion beam figuring and optimal clamping of monochromator grating blanks in their holders. Simulations demonstrate how random noise from the Diamond-NOM’s autocollimator adds into the overall measured value of the mirror’s slope error, and thus predict how many averaged scans are required to accurately characterize different grades of mirror.

Journal Keywords: Nano-metrology; X-ray optics; Diamond-NOM

Subject Areas: Physics, Technique Development


Technical Areas: Metrology , Optics

Added On: 24/05/2016 11:43

Discipline Tags:

Optics Physics Technique Development - Physics Metrology

Technical Tags: