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Wideband multilayer gratings for the 17–25 nm spectral region

DOI: 10.1364/OE.24.015079 DOI Help

Authors: Xiaowei Yang (Tongji University) , Igor V. Kozhevnikov (Russian Academy of Sciences) , Qiushi Huang (Tongji University) , Hongchang Wang (Diamond Light Source) , Kawal Sawhney (Diamond Light Source) , Zhanshan Wang (Tongji University)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Optics Express , VOL 24

State: Published (Approved)
Published: June 2016

Abstract: An approach to designing wideband blazed multilayer gratings is introduced and applied to gratings operating at 17–25 nm. We demonstrate single-order operation of broadband multilayer gratings, despite their very wide spectral and angular bandpass, when only one diffraction wave is excited and the diffraction efficiency reaches the reflectivity of a conventional depth-graded multilayer mirror, eliminating overlapping of different-order diffraction waves. The selection principles for the geometrical parameters of gratings are discussed. We formulate a “law of similarity” for wideband gratings that allows us to design gratings with different geometrical parameters but practically the same spectral dependence of the diffraction efficiency.

Subject Areas: Physics

Technical Areas: Optics

Added On: 03/02/2017 11:10

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