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At-wavelength metrology of X-ray adaptive mirrors at Diamond Light Source

DOI: 10.1364/AOMS.2015.AOTh2C.2 DOI Help

Authors: Hongchang Wang (Diamond Light Source) , Yogesh Kashyap (Diamond Light Source) , John Sutter (Diamond Light Source) , Kawal Sawhney (Diamond Light Source)
Co-authored by industrial partner: No

Type: Conference Paper
Conference: Adaptive Optics: Analysis, Methods & Systems 2015
Peer Reviewed: No

State: Published (Approved)
Published: June 2015

Abstract: An overview of in-situ and at-wavelength metrology techniques implemented at Diamond Light Source is presented, including pencil beam technique, grating interferometry and X-ray speckle based techniques.

Subject Areas: Technique Development, Physics

Technical Areas: Optics