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Characterization of thin film displacements in the electron microscope

DOI: 10.1063/1.4999003 DOI Help

Authors: Hidetaka Sawada (Diamond Light Source; University of Oxford; JEOL UK Ltd) , Reiner Ramlau (Max-Planck-Institut f€ur Chemische Physik fester Stoffe) , Christopher S. Allen (Diamond Light Source; University of Oxford) , Angus I. Kirkland (University of Oxford; Diamond Light Source)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Applied Physics Letters , VOL 111

State: Published (Approved)
Published: November 2017
Diamond Proposal Number(s): 16972

Abstract: It is important to characterize behavior along the normal (z) direction to the plane of a thin film to enable three-dimensional reconstruction at atomic-resolution. In this study, we have investigated displacements of a specimen along the z direction using dark field high angle annular dark field STEM images of single atoms as a function of specimen tilt. These showed an elongation perpendicular to the tilt axis. Experimental measurements of the contrast of single atoms indicate fluctuations in the film along the z direction with a displacement amplitude of 0.6 nm.

Subject Areas: Technique Development, Physics

Diamond Offline Facilities: Electron Physical Sciences Imaging Center (ePSIC)
Instruments: E02-JEM ARM 300CF