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An optical configuration for fastidious STEM detector calibration and the effect of the objective-lens pre-field

DOI: 10.1111/jmi.12672 DOI Help

Authors: L. Jones (Trinity College Dublin; Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN)) , A. Varambhia (University of Oxford) , H. Sawada (Diamond Light Source; JEOL Ltd) , P. D. Nellist (University of Oxford)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Journal Of Microscopy , VOL 180

State: Published (Approved)
Published: January 2018

Abstract: In the scanning transmission electron microscope, an accurate knowledge of detector collection angles is paramount in order to quantify signals on an absolute scale. Here we present an optical configuration designed for the accurate measurement of collection angles for both image-detectors and energy-loss spectrometers. By deflecting a parallel electron beam, carefully calibrated using a diffraction pattern from a known material, we can directly observe the projection-distortion in the post-specimen lenses of probe-corrected instruments, the 3-fold caustic when an image-corrector is fitted, and any misalignment of imaging detectors or spectrometer apertures. We also discuss for the first time, the effect that higher-order aberrations in the objective-lens pre-field has on such an angle-based detector mapping procedure.

Journal Keywords: ADF-STEM; detector angle calibration; detector sensitivity measurement; EELS; quantitative STEM

Subject Areas: Technique Development

Technical Areas: