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Imaging of micro- and nano-structures with hard X-rays

DOI: 10.1049/mnl:20065060 DOI Help

Authors: C. Rau (University of Illinois at Urbana-Champaign; Advanced Photon Source) , V. Crecea (University of Illinois at Urbana-Champaign) , C.-p. Richter (Northwestern University) , K. M. Peterson (University of Illinois at Urbana-Champaign) , P. R. Jemian (University of Illinois) , U. Neuhausler (Universita┬Ęt Bielefeld) , G. Schneider (BESSY) , X. Yu (University of Illinois at Urbana-Champaign) , P. V. Braun (University of Illinois at Urbana-Champaign) , T.-c. Chiang (University of Illinois at Urbana-Champaign) , I. K. Robinson (RCaH, UCL)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Micro And Nano Letters , VOL 2 , PAGES 1-5

State: Published (Approved)
Published: March 2007

Abstract: Imaging of micro- and nano-structures of opaque samples is demonstrated using hard X-rays. Two different methods are employed with an instrument recently built at the beamline 34 ID-C at the Advanced Photon Source. In-line phase contrast micro-imaging has been performed with highly coherent radiation. For the characterisation of structures as small as 50 nm, a hard X-ray microscope has been built. These complementary techniques cover a large range of length-scales

Subject Areas: Physics

Facility: APS