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Coherent grazing exit x-ray scattering geometry for probing the structure of thin films

DOI: 10.1063/1.1669061 DOI Help

Authors: Franz Pfieffer (SLS) , Wei Zhang (University of Illinois) , Ian Robinson (Diamond Light Source)
Co-authored by industrial partner: No

Type: Journal Paper
Journal: Applied Physics Letters , VOL 84 (11) , PAGES 1847-1849

State: Published (Approved)
Published: March 2004

Abstract: We demonstrate a diffraction geometry which provides strong sensitivity to the microstructure of thin films. While a coherent beam of x rays is being reflected from the surface of the sample, measurements were made of the scattering of the exit beam below the critical angle for total external reflection.This results in a strong signal with speckle modulations that are characteristic of the internal arrangement of grains at different depths within the film.

Subject Areas: Physics

Facility: APS

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