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Development of refractive X-ray focusing optics at Diamond Light Source

DOI: 10.1117/12.737350 DOI Help

Authors: L. Alianelli (Diamond Light Source) , K. J. S. Sawhney (Diamond Light Source) , I. M. Loader (Rutherford Appleton Laboratory, U.K.) , D. W. K. Jenkins (Rutherford Appleton Laboratory, U.K.) , R. Stevens (Rutherford Appleton Laboratory, U.K.) , A. Snigirev (ESRF, France) , I. Snigireva (ESRF, France)
Co-authored by industrial partner: No

Type: Conference Paper
Conference: Advances in X-Ray/EUV Optics and Components II
Peer Reviewed: No

State: Published (Approved)
Published: August 2007

Abstract: The Diamond Optics & Metrology Group and the collaborators at the STFC Central Microstructure Facility have initiated a program for the design and fabrication of in-line micro- and nano-focusing optics for synchrotron radiation beamlines. The first type of optics fabricated is a kinoform lens in silicon on the same model proposed by K. Evans- Lutterodt et al [Opt. Expr. 11 (2003) 919.]. The fabrication utilised ultra high resolution electron beam lithographic patterning of an electron sensitive SU8 polymer and deep reactive ion etching of silicon. The first test of the focusing properties was performed at the ESRF BM5 optics beamline. In this paper we present details on the design and fabrication, and discuss the test results.

Subject Areas: Engineering


Technical Areas: Metrology , Optics