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I18-Microfocus Spectroscopy	Laser crystallized low-loss polycrystalline silicon waveguides Yohann Franz , Antoine F. J. Runge , Swe Z. Oo , Gregorio Jimenez-Martinez , Noel Healy , Ali Khokhar , Antulio Tarazona , Harold M. H. Chong , Sakellaris Mailis , Anna C. Peacock Optics Express 27 DOI: 10.1364/OE.27.004462 Diamond Proposal Number(s): [13025] Open Access Show Abstract ▼ Abstract: We report the fabrication of low-loss, low temperature deposited polysilicon waveguides via laser crystallization. The process involves pre-patterning amorphous silicon films to confine the thermal energy during the crystallization phase, which helps to control the grain growth and reduce the heat transfer to the surrounding media, making it compatible with CMOS integration. Micro-Raman spectroscopy, Secco etching and X-ray diffraction measurements reveal the high crystalline quality of the processed waveguides with the formation of millimeter long crystal grains. Optical losses as low as 5.3 dB/cm have been measured, indicating their suitability for the development of high-density integrated circuits.	Feb 2019

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