Aberration-free x-ray lenses made of silicon

DOI: 10.1117/12.2240005

Authors: L. Alianelli (Diamond Light Source) , I. Pape (Diamond Light Source) , J. P. Sutter (Diamond Light Source) , O. J. L. Fox (Diamond Light Source) , K. J. S. Sawhney (Diamond Light Source) , K. Korwin-Mikke (Oxford Instruments Plasma Technology)
Co-authored by industrial partner: Yes

Type: Conference Paper
Conference: Advances in X-Ray/EUV Optics and Components XI
Peer Reviewed: No

State: Published (Approved)
Published: September 2016
Diamond Proposal Number(s): 9980

Abstract: Brilliant beams of hard x-rays, with geometrical cross-sections below 50×50 nm2, are a standard research tool for synchrotron users. With the advent of lower emittance sources, such as NSLSII, Petra III and Max IV, and planned upgraded lattices, such as APS-2, SPING8-II, ESRF II and DLS II, nanofocusing optics operating in transmission mode will become more competitive than they are currently. In general, they suffer from lower efficiency than reflective optics, however they often have easier set-up and alignment, combined with a smaller footprint. Fabrication and exploitation of ultra-short focal refractive lenses has not witnessed the same progress in the last decade as other optics, such as multilayer mirrors and multilayer Laue lenses. This paper reports on current status of high-resolution lithography for fabricating silicon lenses and on proposed designs for a new class of refractive lenses with zero aberrations and good efficiency. The new designs are created with geometrical parameters matching the spatial resolution achieved by modern lithography and silicon etch technology.

Journal Keywords: synchrotron optics; x-ray lenses; geometrical optics

Subject Areas: Physics, Technique Development


Instruments: I13-1-Coherence

Added On: 03/10/2016 11:48

Documents:
99630S.pdf

Discipline Tags:

Optics Physics Technique Development - Physics

Technical Tags:

Imaging Tomography